Description: Airgard is a leading supplier of wet scrubbers to remove water-soluable gasses in semiconductor and solar industry processes, using patented non-clogging gas inlet devices, high-flow spray chambers and packed column design.
wet scrubbers (16) gas abatement (2)
Airgard is the supplier of choice for major semiconductor companies around the world, providing Point Of Use (POU) abatement (gas scrubber) solutions for deposition, etch and diffusion process tools.
POU Scrubbers
Exhaust Management