Description: EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems.
Menu Products Lithography Nanoimprint Lithography Bonding Metrology Process Development Services Technologies NanoCleave™ – IR Laser Cleave Technology MLE™ - Maskless Exposure Technology Nanoimprint Lithography (NIL) - SmartNIL® Wafer Level Optics Optical Lithography Resist Processing Technology Temporary Bonding and Debonding Eutectic Bonding Transient Liquid Phase (TLP) Bonding Anodic Bonding Metal Diffusion Bonding Fusion and Hybrid Bonding Die-to-Wafer Fusion and Hybrid Bonding ComBond® Technology Metro
Korea National Nanofab Center (NNFC) and EV Group sign memorandum of understanding on cooperation in Nanotechnology and IOT Sensors
Wafer bonding and NanoCleave: The New Lithography Scaling – Read our article in the 3DInCites yearbook