Description: The NanoMaker Pattern Generation System (NPGS) is a direct write tool for scanning electron microscopes (SEM) and focused ion beam (FIB) lithography, as well as for dual beam and STEM
sem (2196) pec (210) fib (42) ebl (20) scanning electron microscope (13) pattern generator (9) electron beam lithography (6) npgs (4) direct write (1) proximity effect correction software (1)