Description: scoutNANO is an online analysis system that seamlessly combines metallic nanoparticle and dissolved metal analysis into one fully automated product. scoutNANO builds on the proven scoutDX system to add nanoparticle analysis capability.
esi (107) online monitoring (26) nanoparticle (16) elemental scientific (5) scoutnano (1) dissolved ions (1) multi-element detection (1)
As semiconductor node sizes continue to decrease, metals contamination poses an increasing risk to quality. New research is showing that even sub-ppt nanoparticle contamination can cause quality problems. This low-level nanoparticle contamination is often impossible to detect using traditional dissolved metal analysis. However, nanoparticle analysis is also not well-suited to measuring dissolved metals.
scoutNANO is an online analysis system that seamlessly combines metallic nanoparticle and dissolved metal analysis into one fully automated product. scoutNANO builds on the proven scoutDX system to add nanoparticle analysis capability. Similarly to scoutDX, remote sampling units collect samples and use gas pressure to transfer them to a central unit, where the samples are automatically introduced to an integrated ICP-MS for analysis.
Example diagram (shown to the right) for remote monitoring of incoming/outgoing chemicals and process chemicals using scoutNANO.
Vapor Phase Decomposition - VPD ICPMS Online Monitoring of Silicon Wafer Top/ Bottom Surface and Edge for Metal Contamination
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Vapor Phase Decomposition - VPD ICPMS Online Monitoring of Silicon Wafer Top/ Bottom Surface and Edge for Metal Contamination